JPS63181935U - - Google Patents
Info
- Publication number
- JPS63181935U JPS63181935U JP7229187U JP7229187U JPS63181935U JP S63181935 U JPS63181935 U JP S63181935U JP 7229187 U JP7229187 U JP 7229187U JP 7229187 U JP7229187 U JP 7229187U JP S63181935 U JPS63181935 U JP S63181935U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- base material
- piezoelectric element
- pressure sensor
- vacuum layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7229187U JPS63181935U (en]) | 1987-05-13 | 1987-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7229187U JPS63181935U (en]) | 1987-05-13 | 1987-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63181935U true JPS63181935U (en]) | 1988-11-24 |
Family
ID=30915622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7229187U Pending JPS63181935U (en]) | 1987-05-13 | 1987-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63181935U (en]) |
-
1987
- 1987-05-13 JP JP7229187U patent/JPS63181935U/ja active Pending